| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method by which the heat deformation of an aluminum nitride sintered compact is suppressed in the case the aluminum nitride sintered compact is treated at a high temperature of 1,600 to 1,750°C, and an aluminum nitride sintered compact workpiece whose appearance and dimensional precision are both excellent can be produced. <P>SOLUTION: Regarding the method for producing an aluminum nitride sintered compact workpiece, including a step of treating an aluminum nitride sintered compact obtained by firing aluminum nitride powder at 1,600 to 1,750°C using yttrium oxide as a sintering aid, for example, including a metallizing treatment step or the like, the aluminum nitride sintered compact, in which the abundance of a YAG(3Y<SB>2</SB>O<SB>3</SB>-5Al<SB>2</SB>O<SB>3</SB>) crystal phase in the grain boundary phase is ≤0.001 by the intensity ratio of the X-ray diffraction pattern of the YAG (211) face to the aluminum nitride (100) face, is used. <P>COPYRIGHT: (C)2011,JPO&INPIT |
