| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for producing trichlorosilane and a method for producing trichlorosilane that enable heating of supply gas with high heat efficiency, enable to enlarge the size of the apparatus without reducing the heat efficiency, and enable mass production of trichlorosilane. SOLUTION: An apparatus 100 for producing trichlorosilane, including: a reaction vessel 10 that has a substantially cylindrical wall body 11, a top plate 12 that closes an upper opening of the wall body 11, and a bottom plate 13 that closes a lower opening of the wall body 11, where a reaction product gas including trichlorosilane and hydrogen chloride is produced from the raw gas including tetrachlorosilane and hydrogen and supplied through a gas introducing passage 11b provided to the lower section of the cylindrical wall body 11; and a plurality of heaters 20 that are disposed inside the reaction vessel 10 to heat the raw gas, wherein each of the heaters 20 has a heating element 21 that generates heat by electrification, and a receptacle 22 that supports the lower ends of the heating element 21; a flange 23 is provided to intermediate height of the heating element 21 such that the flange 23 is arranged to a position higher than the gas introducing passage 11b and is elongated in horizontal direction; and a passage 102 of the raw gas formed between adjacent heaters 20 is narrowed by the flange 23. COPYRIGHT: (C)2011,JPO&INPIT
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