METHOD OF PROCESSING TEMPLATE, PROGRAM, COMPUTER STORAGE MEDIUM, AND TEMPLATE PROCESSING DEVICE

摘要

PROBLEM TO BE SOLVED: To properly form a film of a mold release agent on a surface of a template so that a predetermined pattern is formed on a substrate by using a template. SOLUTION: A film forming unit includes a mold release agent supply portion 112 that forms the film of the mold release agent S only on an upper surface of a convex portion C1of a transfer pattern C of the template T. The mold release agent supply portion 112 includes a support member 120. The support member 120 holds a first roller 121 for applying the mold release agent S to the upper surface of the convex portion C1in contact with an upper surface of the convex portion C1, a second roller 122 which is extended in the same axial direction as that of the first roller 121 and is in contact with the first roller 121, a mold release agent nozzle 123 for supplying the liquid mold release agent S to a surface of the second roller 122, and a drying nozzle 124 that supplies gas to the mold release agent S applied to the upper surface of the convex portion C1so as to dry the mold release agent S. COPYRIGHT: (C)2011,JPO&INPIT