MASK HOLDING APPARATUS AND THIN FILM FORMING APPARATUS

摘要

Disclosed is a mask holding apparatus, which can hold, without making wrinkles, a single mask that is not provided with a mask frame, and which transfers the mask onto a substrate or adjusts alignment of the mask with the substrate. A mask holding/aligning apparatus (5), which holds the sheet-like mask that contains a magnetic material and has an opening for pattern-forming a thin film on the substrate, is provided with a mask magnetization plate (54), which, by means of a plurality of permanent magnets disposed on one surface side, magnetizes the mask on the other surface side. The permanent magnets are configured such that, on the other surface side of the mask magnetization plate (54), the distribution of a magnetic field in a first region and the distribution of a magnetic field in a second region are different from each other.