| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a debris collecting device which has high efficiency, is compact and inexpensive, in an extreme ultraviolet light generating device. <P>SOLUTION: In the extreme ultraviolet light generating device, a magnetic field generating device having a structure with which a bulk high-temperature superconductor and a coil for pulse magnetic field generation can be cooled down to very low temperature, and a center axis that magnetic lines of force of the magnetic field generating device pass through, are made to be hollow to serve as a waveguide of drive laser light and a microwave. A reflector for the microwave is suitably arranged on the opposite side from the magnetic field generating device with respect to a plasma generation point so that a plasma neighborhood generating EUV light is within an open resonance area of the microwave, thereby the debris collecting device, which has high efficiency and is compact and inexpensive, is achieved, by substantially complete ionization of neutral debris by ECR resonance of a magnetic field and microwave, confinement of the debris in plasma, and movement of the debris to a hollow portion of the magnetic field generating device. <P>COPYRIGHT: (C)2011,JPO&INPIT |
