| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a dielectric-coated electrode and a plasma-discharge processing device. <P>SOLUTION: Square pillar-shaped dielectric-coated electrodes 36c, 36C are formed by coating conductive base materials (hollow stainless steel pipes) 36b, 36B with dielectrics 36a, 36A, with a porosity of the dielectrics 36a, 36A of ≤10 vol.%. Specifically, spraying of ceramic is accurately performed to the porosity down to ≤10 vol.%, and further, a sealing treatment is performed with an inorganic material cured by sol-gel reaction. Here, thermosetting and UV curing methods are suitable for accelerating the sol-gel reaction. When consecutively repeating coating and curing several times by diluting sealing liquid, an inorganic state of the inorganic material can be further improved, and then, an accurate electrode which is hardly deteriorated can be achieved. <P>COPYRIGHT: (C)2011,JPO&INPIT |
