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发明名称
SPIN COATER
摘要
申请公布号
KR101065627(B1)
申请公布日期
2011.09.19
申请号
KR20110001432
申请日期
2011.01.06
申请人
M&S SYSTEM CO., LTD.
发明人
JUN, DONG YON
分类号
H01L21/302;H01L21/786
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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