发明名称 |
PROCESS ABATEMENT REACTOR |
摘要 |
PROBLEM TO BE SOLVED: To provide an improved method and apparatus for abating an exhaust stream. SOLUTION: In certain embodiments, an apparatus is provided for use in removing pollutants from a gas stream. The apparatus includes a thermal reaction unit formed from a plurality of stacked porous ceramic rings. A first of the porous ceramic rings has a first coefficient of thermal expansion (CTE) and a second of the porous ceramic rings has a second CTE. Numerous other aspects are provided. COPYRIGHT: (C)2011,JPO&INPIT
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申请公布号 |
JP2011174695(A) |
申请公布日期 |
2011.09.08 |
申请号 |
JP20110081443 |
申请日期 |
2011.04.01 |
申请人 |
APPLIED MATERIALS INC |
发明人 |
CLARK DANIEL O;RAOUX SEBASTIEN;VERMEULEN ROBERT M;CRAWFORD SHAUN W |
分类号 |
F23G7/06;B01J19/24;H01L21/205;H01L21/31 |
主分类号 |
F23G7/06 |
代理机构 |
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