发明名称 PROCESS ABATEMENT REACTOR
摘要 PROBLEM TO BE SOLVED: To provide an improved method and apparatus for abating an exhaust stream. SOLUTION: In certain embodiments, an apparatus is provided for use in removing pollutants from a gas stream. The apparatus includes a thermal reaction unit formed from a plurality of stacked porous ceramic rings. A first of the porous ceramic rings has a first coefficient of thermal expansion (CTE) and a second of the porous ceramic rings has a second CTE. Numerous other aspects are provided. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011174695(A) 申请公布日期 2011.09.08
申请号 JP20110081443 申请日期 2011.04.01
申请人 APPLIED MATERIALS INC 发明人 CLARK DANIEL O;RAOUX SEBASTIEN;VERMEULEN ROBERT M;CRAWFORD SHAUN W
分类号 F23G7/06;B01J19/24;H01L21/205;H01L21/31 主分类号 F23G7/06
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