发明名称 TUNNELING FIELD-EFFECT TRANSISTOR WITH DIRECT TUNNELING FOR ENHANCED TUNNELING CURRENT
摘要 Horizontal and vertical tunneling field-effect transistors (TFETs) having an abrupt junction between source and drain regions increases probability of direct tunneling of carriers (e.g., electrons and holes). The increased probability allows a higher achievable on current in TFETs having the abrupt junction. The abrupt junction may be formed by placement of a dielectric layer or a dielectric layer and a semiconductor layer in a current path between the source and drain regions. The dielectric layer may be a low permittivity oxide such as silicon oxide, lanthanum oxide, zirconium oxide, or aluminum oxide.
申请公布号 US2011215425(A1) 申请公布日期 2011.09.08
申请号 US20100719697 申请日期 2010.03.08
申请人 SEMATECH, INC 发明人 LOH WEI-YIP;COSS BRIAN;JEON KANGHOON
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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