ETCHING METHOD FOR COPPER OR COPPER ALLOY

摘要

PROBLEM TO BE SOLVED: To provide an etching method for copper or copper alloy that is used for manufacturing a printed wiring board, having a fine wiring pattern, with an excellent yield and without causing a short-circuit defect when executing etching by an etchant containing a banking agent. SOLUTION: The etching method of copper or copper alloy is configured as follows. The surface of copper or a copper alloy is polished by chemical polishing. Then, a resist pattern is formed on the surface of the copper or the copper alloy. The surface of the copper or the copper alloy is etched by an etchant containing a banking agent. COPYRIGHT: (C)2011,JPO&INPIT