| 摘要 |
PROBLEM TO BE SOLVED: To form a fine pattern on a molded product finally obtained, according to an initial aim by preventing a local deformation of the fine pattern upon the stamper production. SOLUTION: The method of producing stamper includes a process (i) of preparing the resist master on which the fine pattern B corresponding to an inverted shape of the fine pattern A of the stamper is formed and a process (ii) of obtaining the stamper formed of the fine pattern A by performing electroforming using the resist master as a mother mold, wherein, on a fine pattern formation surface of the resist master prepared in the process (i), a recessed pattern is formed so as to be extended radially around the fine pattern B and, in the process (ii), a stress that may be generated upon the electroforming is relaxed by the recessed pattern. COPYRIGHT: (C)2011,JPO&INPIT
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