| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an evacuation device of a measuring apparatus to minimize a footprint of a production line in maintenance and calibration. <P>SOLUTION: The radiation measuring apparatus that is disposed in a direction substantially perpendicular to an object to be measured (sample) having prescribed width and has a C-type frame for simultaneously measuring physical quantity of entire width of the sample includes a turning mechanism that moves substantially 2/3 of the sample width of the C-type frame in a direction perpendicular to the sample, moves and turns the remaining substantially 1/3 continuously, and changes the direction substantially by 90 degrees to the width direction of the sample for evacuating substantially in parallel to a longitudinal direction of the sample. <P>COPYRIGHT: (C)2011,JPO&INPIT |
