| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum switching method, allowing rapid switching from high vacuum to low vacuum in a vacuum assignment device. SOLUTION: In the vacuum switching method, when the pressure of a flow passage part 8 connected to a suction chuck 7 for sucking or separating a work W is reduced to a relatively low vacuum from a first negative pressure state with high vacuum, an on-off valve 6 is put into OFF state only for a slight period, just after the flow passage portion 8 is connected to a second negative pressure control device 4, to introduce the outside air to the flow passage portion 8, and the on-off valve 6 is then put into ON state to reduce the pressure of the flow passage portion from the negative pressure control device 4 to the suction chuck 7. Thereafter, the on-off valve 6 is put into OFF state to separate the work W. COPYRIGHT: (C)2011,JPO&INPIT |
