发明名称 |
CVD-Siemens Reactor Process Hydrogen Recycle System |
摘要 |
A hydrogen recycle process and system for use with chemical vapor deposition (CVD) Siemens type processes is provided. The process results in substantially complete or complete hydrogen utilization and substantially contamination-free or contamination-free hydrogen.
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申请公布号 |
US2011206842(A1) |
申请公布日期 |
2011.08.25 |
申请号 |
US20100712314 |
申请日期 |
2010.02.25 |
申请人 |
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发明人 |
REVANKAR VITHAL;LAHOTI SANJEEV |
分类号 |
C23C16/448;C23C16/00 |
主分类号 |
C23C16/448 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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