| 摘要 |
An apparatus for depositing and inspecting an organic light emitting display panel includes a depositor part configured to deposit thin film layers on a panel, the thin film layers including an anode layer, an organic film layer, and a cathode layer, and an inspector part configured to measure spectra of light reflected from the thin film layers, compare the measured spectra to reference spectra, and determine thickness correctness of individual thin film layers.
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