发明名称 PIEZOELECTRIC DEVICE AND MANUFACTURING METHOD THEREFOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a smaller piezoelectric device with higher connection reliability and a manufacturing method for the same. <P>SOLUTION: The piezoelectric device 10 includes a piezoelectric vibration piece 60 provided with a connecting electrode pad 64, and a semiconductor device 40 electrically connected to the connecting electrode pad 64 and having an electrode pattern 50 supporting the piezoelectric vibration piece 60. The electrode pattern 50 has one end connected to a pad of the semiconductor device 40 and the other end connected to the connecting electrode pad 64. A bending portion 52 which rises in a direction separating from one principal surface 43 of the semiconductor device 40 is formed between one end and the other end, and resin is formed at the bending portion 52 between the one principal surface 43 and the electrode pattern 50. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011164003(A) 申请公布日期 2011.08.25
申请号 JP20100028613 申请日期 2010.02.12
申请人 SEIKO EPSON CORP 发明人 NAKAJIMA SATOSHI
分类号 G01C19/56;G01C19/5628;H01L21/60;H01L41/08;H01L41/22;H01L41/313 主分类号 G01C19/56
代理机构 代理人
主权项
地址