SUBSTRATE CONVEYING APPARATUS AND SUBSTRATE TREATING APPARATUS WITH IT

摘要

PURPOSE: A substrate conveying apparatus and a substrate treating apparatus with the same are provided to prevent a carrier belt from being inclined or damage thereof by transferring a substrate through the carrier belt of a trapezoidal shape. CONSTITUTION: In a substrate conveying apparatus and a substrate treating apparatus with the same, a plurality of substrate transfer apparatuses(200) are mutually connected in inlet conveyor(120) and an outlet conveyor(140). A main roller(240) transfers the substrate(S) in one direction . A main roller is extended in vertical to the transfer direction of the substrate. A carrier belt(210) is circulated by the main roller and is transferred in longitudinal direction The carrier belt includes a guide line extending along the inner side thereof.