| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of grinding a workpiece without causing any damage thereto. SOLUTION: The method of grinding the workpiece includes an arrangement step of arranging the workpiece on an adhesive sheet having an adhesive layer formed on a base material so that the surface side thereof abuts against the adhesive layer, a thinning step of thinning the workpiece arranged on the adhesive sheet to have a predetermined thickness by grinding the backside thereof while curing the adhesive layer by cooling the adhesive sheet, and a removing step of removing the workpiece subjected to thinning from the adhesive sheet. COPYRIGHT: (C)2011,JPO&INPIT |
