发明名称 Methods and Apparatus for Robust Flip Chip Interconnections
摘要 Apparatus and methods for providing a robust solder connection in a flip chip arrangement using lead free solder are disclosed. A copper column extends from an input/output terminal of an integrated circuit. A cap layer of a material comprising one of nickel, nickel alloys, palladium, platinum, cobalt, silver, gold, and alloys of these is formed on the exterior surface of the copper column. A lead free solder connector is disposed on the cap layer. A substrate having a metal finish solder pad is aligned with the solder connector. A thermal reflow is performed. The metal finish may be of nickel, nickel alloy and nickel based materials. Following a thermal reflow, the solder connection formed between the copper terminal column and the metal finish solder pad is less than 0.5 wt. %.
申请公布号 US2011193227(A1) 申请公布日期 2011.08.11
申请号 US20100729021 申请日期 2010.03.22
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHUANG YAO-CHUN;HSIAO CHING-WEN;KUO CHEN-CHENG;CHEN CHEN-SHIEN
分类号 H01L23/488;H01L21/60;H01L23/31 主分类号 H01L23/488
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