MICROLENS ARRAY ELEMENT AND METHOD OF MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To achieve a method of manufacturing microlens array elements in good yield.

SOLUTION: The method includes steps of: forming a desired number of microlens arrays MLA on one side of a parallel flat glass substrate GS at a desired pitch; forming a protective layer PL with a thickness of 0.1 to 20 μm on the surface with the formed microlens arrays MLA by heating of a polycondensation material with SiO2as skeleton so as to achieve a predetermined focal length; forming a glass substrate with a predetermined thickness by polishing the reverse side of the side on which the microlens array of the glass substrate GS is formed after bonding and fixing the flat side of parallel flat base glass BG by an adhesive BL; forming a transparent electrode film TCL and a black matrix BM on the polished side; and separating and making chips for each microlens array to obtain a microlens array element.

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