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发明名称
METHOD OF NONSTOICHIOMETRIC CVD DIELECTRIC FILM SURFACE PASSIVATION FOR FILM ROUGHNESS CONTROL
摘要
申请公布号
KR20110091500(A)
申请公布日期
2011.08.11
申请号
KR20117005125
申请日期
2009.11.11
申请人
MICROCHIP TECHNOLOGY INC.
发明人
KIM LANCE;KIM, KWANG HOON
分类号
H01L21/3105
主分类号
H01L21/3105
代理机构
代理人
主权项
地址
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