发明名称 Method of manufacturing display unit
摘要 An exposure method that suppresses distribution of pattern shapes at the time of exposure. In a manufacturing method for a display unit, a layer forming a reference for pattern arrangement is determined among layers formed on a panel. An arrangement of a pattern in a layer above the reference layer is determined using a value obtained from distribution of the pattern arrangement in the reference layer.
申请公布号 US7993179(B2) 申请公布日期 2011.08.09
申请号 US20080015534 申请日期 2008.01.17
申请人 HITACHI DISPLAYS, LTD. 发明人 ISHIKAWA SEIJI;OOIDA JUN;MURAMATSU YOSHINORI;MIYAZAKI TAKAHIRO
分类号 H01J9/24 主分类号 H01J9/24
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