发明名称 METHOD AND APPARATUS FOR LASER CONTROL IN A TWO CHAMBER GAS DISCHARGE LASER
摘要 <p>A laser control system contains an oscillator gas chamber and an amplifier gas chamber. A first voltage input is operatively connected to deliver electrical pulses to a first pair of electrodes within the oscillator gas chamber and a second pair of electrodes within the amplifier gas chamber. An output of the gas chambers is an energy dose calculated by a trapezoidal window. A control circuit connects to the first voltage input for modifying the first voltage input. A feedback control loop communicates an output of the gas chambers to the control circuit for modifying the first voltage input.</p>
申请公布号 EP2351170(A1) 申请公布日期 2011.08.03
申请号 EP20090822307 申请日期 2009.10.20
申请人 CYMER, INC. 发明人 JACQUES, ROBERT, N.
分类号 H01S3/13;H01S3/104 主分类号 H01S3/13
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