| 摘要 |
PROBLEM TO BE SOLVED: To provide a dielectric layer formed of a rare earth aluminate having a perovskite structure. SOLUTION: The application relates to a dielectric layer containing a rare-earth aluminate (RE<SB>x</SB>Al<SB>2-x</SB>O<SB>3</SB>, wherein 0<x<2) and having a perovskite crystalline structure, wherein the rare-earth aluminate contains a rare-earth element having an atomic number 63 to 71. The application also relates to a dielectric stack containing the rare-earth aluminate dielectric layer and further contains a template stack comprising at least an upper template layer 104, and a method of manufacturing the dielectric stack, wherein the upper template layer 104 has a perovskite structure, and wherein the upper template layer 104 underlies and contacts the rare-earth aluminate dielectric layer 105. In a preferred embodiment, the dielectric stack further includes a lower template layer 103 having a crystalline structure, wherein the lower template layer 103 underlies and contacts the upper template layer 104. COPYRIGHT: (C)2011,JPO&INPIT |
