| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxide superconducting film, and its manufacturing method, with movement of quantized magnetic flux effectively restrained, irrespective of directions of impressed magnetic fields or a site of the film. SOLUTION: The method of manufacturing the oxide superconducting film with a laser deposition method includes a process of forming an oxide superconducting film containing 0.3 to 6 mass% of ratios of impurities being a normal conduction part on a base material 12 by simultaneously irradiating an excimer laser beam 18a and a YAG laser beam 18b onto a target 15. COPYRIGHT: (C)2011,JPO&INPIT |
