发明名称 |
Apparatus and method for coating polyimide layer |
摘要 |
An apparatus for coating a polyimide layer includes a printing table in which a substrate is provided, an inkjet head having an injection surface with nozzles for injecting a polyimide liquid onto the substrate, a polyimide liquid supply tank filled with the polyimide liquid, an ultrasonic cleaner in which a cleaning liquid for cleaning the inkjet head is stored for cleaning the inkjet head with vibrations in the cleaning liquid generated by applying an ultrasonic signal, and a wiper for wiping an injection surface of the inkjet head. |
申请公布号 |
US7980196(B2) |
申请公布日期 |
2011.07.19 |
申请号 |
US20060647232 |
申请日期 |
2006.12.29 |
申请人 |
LG DISPLAY CO., LTD.;ULVAC, INC. |
发明人 |
KIM BONG CHUL;CHO JUN BEOM;LEE SEUNG HYUNG;KOO KYO YONG;SEO HYEON JIN;KWON DHANG;TAFF ROBERT |
分类号 |
B05C21/00 |
主分类号 |
B05C21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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