发明名称 |
METHODS AND SYSTEMS FOR PRODUCING SILICON, E.G., POLYSILICON, INCLUDING RECYCLING BYPRODUCTS |
摘要 |
Systems and processes are provided for efficient, cost-effective production of silicon by chemical vapor deposition. Reaction byproducts are recycled for use within the systems and processes without recovery and external processing of the byproducts. The systems and processes provide savings in both capital and operating costs. |
申请公布号 |
WO2011084427(A2) |
申请公布日期 |
2011.07.14 |
申请号 |
WO2010US60328 |
申请日期 |
2010.12.14 |
申请人 |
INTELLIGENT SOLAR, LLC;DASSEL, MARK, W.;XIAO, JIE |
发明人 |
DASSEL, MARK, W.;XIAO, JIE |
分类号 |
C01B33/027;B01J8/00;B01J19/02;C23C16/24;C23C16/455 |
主分类号 |
C01B33/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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