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发明名称
ALIGNING CHARGED PARTICLE BEAMS
摘要
申请公布号
EP2342734(A2)
申请公布日期
2011.07.13
申请号
EP20090791414
申请日期
2009.08.12
申请人
CARL ZEISS NTS, LLC.
发明人
HILL, RAYMOND
分类号
H01J37/147
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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