| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pressure control system having improved pressure control responsiveness. SOLUTION: In the vacuum pressure control system configured to adjust the opening of a vacuum-proportional opening and closing valve 16 to feedback-control a vacuum pressure in a reaction chamber 10 to a target pressure, a leak start position of an O-ring 49 is calculated based on the vacuum pressure in the reaction chamber 10 or a vacuum target pressure, and the precompression pressure value of a cylinder of the on-off valve is used as a lower limit value of the feedback control. COPYRIGHT: (C)2011,JPO&INPIT
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