| 发明名称 |
SUBSTRATE CASE AND SUBSTRATE ACCOMMODATION APPARATUS |
| 摘要 |
<p>A substrate case includes a shaft portion around which a sheet-shaped substrate having a circuit area in which a circuit manufacturing process is performed is wound; and a cover portion that accommodates the substrate in the state of being wound around the shaft portion, the shaft portion having a holding portion that holds an area different from the circuit area at a winding start portion of the substrate.</p> |
| 申请公布号 |
WO2011081220(A1) |
申请公布日期 |
2011.07.07 |
| 申请号 |
WO2010JP73899 |
申请日期 |
2010.12.28 |
| 申请人 |
NIKON CORPORATION;MIZUTANI HIDEO;KIUCHI TOHRU;KAWAGUCHI TORU;MASUKAWA TAKASHI |
发明人 |
MIZUTANI HIDEO;KIUCHI TOHRU;KAWAGUCHI TORU;MASUKAWA TAKASHI |
| 分类号 |
B65H75/14;B65H18/02;H01L21/673 |
主分类号 |
B65H75/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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