| 摘要 |
PROBLEM TO BE SOLVED: To quickly detect at least a projecting amount of a substrate and a hanging amount of the substrate as an index quantitatively indicative of a storage condition of a substrate stored in each slot of a substrate storage container. SOLUTION: A substrate storage condition detecting device includes an imaging unit 3 capturing an image of an end on a side of an opening 19 of the substrate 11 stored in each slot as seen from a direction perpendicular to an arrangement direction of the substrate 11 and a discharging direction of the substrate 11, and a substrate storage condition detecting module 61 detecting the projecting amount of the substrate 11 projecting forward of the opening 19 from a predetermined storage position and a hanging amount of the substrate 11 with its end on the side of the opening 19 hanging down as the index quantitatively indicative of the storage condition of the substrate stored in each slot based on the image captured by the imaging unit 3 and outputting the detected projecting amount and hanging amount of the substrate 11. COPYRIGHT: (C)2011,JPO&INPIT |
