| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus capable of measuring a height directional position of a foreign substance. SOLUTION: The X-ray inspection apparatus 100 detects X-rays to be irradiated from one fixedly installed X-ray irradiator 200 by two fixedly installed X-ray line sensors 400a and 400b, and detects the foreign substance 910 in an article 900 by feeding the article 900 into the X-rays to be irradiated. A control section 610 of the X-ray inspection apparatus 100 measures the height directional position of the foreign substance 910 in the article 900 based on image data D900a and D900b created by the X-ray line sensors 400a and 400b. COPYRIGHT: (C)2011,JPO&INPIT
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