发明名称 Scanning probe microscope and active damping drive control device
摘要 Driving control is performed by supplying a Z scanner with a driving signal processed by an adjustment function. The adjustment function adjusts the driving signal by using a simulated transfer function that simulates an actual transfer function indicative of an actual frequency characteristic of the Z scanner so that executing processing of the simulated transfer function on the adjusted driving results in decrease of vibration of an output signal from the simulated transfer function. The adjustment function processing is configured so as to execute processing of the simulated transfer function G(s) on the driving signal, to execute processing of an inverse target transfer function K(s) corresponding to the inverse of the target transfer function on an output from the G(s), to determine the difference between the driving signal and the output of K(s), to apply a gain g to the difference, and to add the signal after the gain is applied to the driving signal. Therefore, the output from the G(s) approximates to the target transfer function which is the inverse of the K(s).
申请公布号 US7975314(B2) 申请公布日期 2011.07.05
申请号 US20070439700 申请日期 2007.07.27
申请人 NATIONAL UNIVERSITY CORPORATION KANAZAWA UNIVERSITY 发明人 ANDO TOSHIO
分类号 G01Q10/06;G01Q70/00 主分类号 G01Q10/06
代理机构 代理人
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