发明名称 Source/drain strained layers
摘要 A semiconductor device and method of manufacture thereof wherein a PMOS source/drain region of a transistor within the substrate includes a first strained layer in the PMOS source/drain region and a first capping layer in contact with the first strained layer. Further, the semiconductor device and method provide for an NMOS source/drain region of a transistor within the substrate including a second strained layer in the NMOS source/drain region and a second capping layer in contact with the second strained layer.
申请公布号 US7973337(B2) 申请公布日期 2011.07.05
申请号 US20100844896 申请日期 2010.07.28
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 YU MING-HUA;YEH LING-YEN;LEE TZE-LIANG
分类号 H01L31/0328 主分类号 H01L31/0328
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