发明名称 APPARATUS AND METHOD FOR PRODUCING FINE PARTICLE
摘要 PURPOSE: A device and a method for forming particles are provided to attach a deposition material on the surface of an object without forming particles. CONSTITUTION: A device(1) for forming particles comprises a vacuum arc deposition source(5), a container, a stirring unit, and a shattering unit. The container is arranged on the opposite side of the vacuum arc deposition source and accepts a powder type carrier. The stirring unit stirs the powder type carrier inside the container. The shattering unit strikes the bottom surface of the container to shatter the pieces of the powder type carrier.
申请公布号 KR20110074719(A) 申请公布日期 2011.07.01
申请号 KR20100134725 申请日期 2010.12.24
申请人 ULVAC-RIKO, INC. 发明人 AGAWA YOSHIAKI;ISHII YOSHIKAZU;ENDO SATOSHI;MATSUURA MASAMICHI
分类号 C23C14/24;B22F9/14;C23C14/00 主分类号 C23C14/24
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