| 摘要 |
PROBLEM TO BE SOLVED: To provide a movable diaphragm position control method and a device of an electron microscope enabled in carrying out intuitive operation in the case of moving a diaphragm. SOLUTION: The device for controlling a position of a movable diaphragm of the electron microscope is composed of an operating part 10 for specifying a moving direction of the diaphragm, a CPU 12 carrying out the correction control of the moving direction of the diaphragm based on the specification from the operating part 10, and an optical system condition table 11 with correction data stored for correcting disposition against moving direction data of the diaphragm and the moving direction of the diaphragm. The CPU 12 is so constituted to carry out correction calculation so that a position of the movable diaphragm 14 is in a moving direction specified by the operating part 10 with reference to the optical system condition table 11 in accordance with the specification of the moving direction from the operating part 10, and drive a movable diaphragm motor 13 with drive data resulting from the correction calculation. COPYRIGHT: (C)2011,JPO&INPIT |
