CHEMICAL-MECHANICAL POLISHING LIQUID

摘要

A chemical-mechanical polishing liquid is provided. The polishing liquid comprises abrasive particles, a polymer, water, as well as a stabilizer for improving the stability of the polishing slurry. In the polishing liquid,the growth rate of the particle size of the abrasive particles with time extended is low. The chemical-mechanical polishing liquid has higher stability, longer storage time and service life.