发明名称 Method of fabricating semiconductor device
摘要 There is provided a method of fabricating a semiconductor including: forming a first and a second bipolar transistors on a semiconductor substrate; forming a dummy layer on, or on the periphery of, at least one region of the emitter region, the base region, or the collector region of the second bipolar transistor and on an area surrounding a contact region for establishing an electrical connection to the outside in the at least one of the emitter region, the base region, or the collector region; forming an insulation layer so as to cover the first bipolar transistor, the second bipolar transistor, and the dummy layer; forming, together with the insulation layer and in a contact region of each region of the first bipolar transistor and the second bipolar transistor, a contact hole for establishing contact with each of those regions; and embedding a conductive member in the contact holes.
申请公布号 US2011151638(A1) 申请公布日期 2011.06.23
申请号 US20100926797 申请日期 2010.12.09
申请人 OKI SEMICONDUCTOR CO., LTD. 发明人 YAMAIDE KATSUHIRO
分类号 H01L21/8222 主分类号 H01L21/8222
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