| 摘要 |
PURPOSE: A plasma reactor for generating large size plasma is provided to generate large size plasma and maintain it by installing a circular a middle electrode at the inner center of a plasma reactor. CONSTITUTION: A reactor body(11) comprises a substrate support supporting a target substrate(13) to be processed. A gas supply unit(20) supplies a process gas into the plasma reactor. A middle electrode divides the space between the substrate support and the gas supply unit. A power supply unit(40) applies a frequency power to the middle electrode. The frequency power generated from the power supply unit is applied to the middle electrode through an impedance matching device.
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