| 摘要 |
PROBLEM TO BE SOLVED: To efficiently carry out a drying treatment by keeping the interior of a treatment vessel in a condition suitable for vaporization. SOLUTION: This treatment device comprises: a treatment vessel which accommodates an object to be treated; a heating means which heats the interior of the treatment vessel; a ventilation means which ventilates the internal air of the treatment vessel and introduces the open air inside; a detection means which detects the humidity of the internal air of the treatment vessel in terms of physical quantity; and a control means which controls the ventilation means and further, controls the ventilation quantity of the internal air of the treatment vessel according to the detection results of the ventilation means. COPYRIGHT: (C)2011,JPO&INPIT
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