| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid phase laser ablation apparatus having sufficiently high production efficiency continuously and stably producing particles in the liquid phase regardless of the kind of a target material. SOLUTION: The liquid phase laser ablation apparatus includes: a laser oscillator 10 generating laser beam L; a treatment vessel 13 having a window 13A introducing the laser beam and holding a solvent 14; a target 15 disposed in the treatment vessel; an outflow pipe 16 letting the solvent flow out of the treatment vessel; an inflow pipe 17 letting the solvent flow in the treatment vessel; a pump 18 letting the solvent flow into the outflow pipe and inflow pipe; and a filter 19 having hole diameters of 15-1,000 nm, disposed in a circulation path consisting of the flow path of the solvent in the outflow pipe, the flow path of the solvent in the inflow path and the flow path of the solvent in the pump, and recovering the particles formed by the laser ablation from the inside of the solvent flowing in the circulation path. COPYRIGHT: (C)2011,JPO&INPIT |
