发明名称 FUSE OF SEMICONDUCTOR DEVICE AND METHOD FOR FORMING USING THE SAME
摘要 PURPOSE: The fuse of a semiconductor device and a method for forming the same are provided to protect peripheral patterns from laser applied during a blowing process by absorbing the energy of the laser using voids or stepped parts. CONSTITUTION: An interlayer insulating film(102) is arranged on a semiconductor substrate, and a trench(108) is arranged on the upper side of the interlayer insulating film. An insulating film is arranged on the upper side of the interlayer insulating film with the trench. A metal wiring is formed on the upper side of the insulating film. A contact is in connection with both end parts of the metal wiring. A fuse wiring is in contact with the upper side of the contact.
申请公布号 KR20110065658(A) 申请公布日期 2011.06.16
申请号 KR20090122253 申请日期 2009.12.10
申请人 HYNIX SEMICONDUCTOR INC. 发明人 SHIN, YUN HO
分类号 H01L21/82;H01L23/62 主分类号 H01L21/82
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