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发明名称
Edge frame for thin film deposition apparutus
摘要
申请公布号
KR101040940(B1)
申请公布日期
2011.06.16
申请号
KR20040014358
申请日期
2004.03.03
申请人
发明人
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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