| 摘要 |
<p>An optical arrangement for homogenizing an at least partly coherent light field in a light pulse, a pulsed light source, more particularly a laser, preferably an excimer laser, consisting of at least one optical loop, with a beam-splitter apparatus being provided in the optical loop. The beam-splitter apparatus separates the light field into two beamlets, polarized perpendicular to each other, with a first and a second polarization direction, the first beamlets with the first polarization direction reaching a surface to be illuminated without passing through the loop and the second beamlets with the second polarization direction passing through the optical loop, in which a polarization rotator is provided in the optical loop and rotates the second polarization direction of the second beamlets by an angle, which can be defined in advance, and so at least part of the second beamlets again pass through the optical loop with the first polarization direction, and so the beamsplitter apparatus decouples the other part of the second beamlets with the second polarization direction from the loop and the latter reach the surface to be illuminated superposed, offset in time, with respect to the first beamlets.</p> |
