| 摘要 |
PURPOSE: An apparatus for supplying isopropyl alcohol for manufacturing a fine circuit device is provided to heat the isopropyl alcohol without danger through indirect heating. CONSTITUTION: A storage(10) stores isopropyl alcohol. A pressing unit(12) provides the pressured gas to the storage. A supplying unit supplies the isopropyl alcohol to a substrate for manufacturing the fine circuit device by the pressurization of the pressing unit. A heating unit(16) is installed on the supplying unit and heats the isopropyl alcohol through the indirect heating.
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