发明名称 |
HORIZONTAL TYPE CONTACTLESS DEPOSITION APPARATUS |
摘要 |
<p>PURPOSE: A horizontal contactless deposition apparatus is provided to be easily loaded on a base by a roller of a load lock chamber, thereby increasing the efficiency of a deposition process. CONSTITUTION: A deposition chamber(8) performs a deposition process. A conveyor(9) conveys a substrate in the deposition chamber. A base(10) is formed on the bottom of the deposition chamber. A first support unit is made of a permanent magnet(60) and a magnetic plate(50). A second support unit is formed between the base and the conveyor.</p> |
申请公布号 |
KR20110058344(A) |
申请公布日期 |
2011.06.01 |
申请号 |
KR20090115095 |
申请日期 |
2009.11.26 |
申请人 |
KOREA ELECTROTECHNOLOGY RESEARCH INSTITUTE |
发明人 |
KIM, JONG MOON;OH, HYUN SEOK;GIM, HYEON TAEG;JEON, JEONG WOO;CHUNG, SUNG IL |
分类号 |
H01L21/677;B65G49/06;C23C14/00;H01L21/20 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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