发明名称 |
PROBE CARD AND TEST APPARATUS INCLUDING THE SAME |
摘要 |
A probe card and a test apparatus including the probe card for improving test reliability. The probe card may include a first input terminal Microelectromechanical Systems (MEMS) switch that connects a first input terminal and a first input probe pin, wherein the first input terminal MEMS switch comprises a control portion that receives an operation signal and a connection portion that connects the first input terminal and the first input probe pin. The probe card may further include a first output terminal MEMS switch that connects a first output terminal and a first output probe pin, wherein the first output terminal MEMS switch comprises a control portion that receives the operation signal and a connection portion that connects the first output terminal and the first output probe pin.
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申请公布号 |
US2011121852(A1) |
申请公布日期 |
2011.05.26 |
申请号 |
US20100817826 |
申请日期 |
2010.06.17 |
申请人 |
HORII HIDEKI;KIM YOUNG-KUK;PARK MI-LIM |
发明人 |
HORII HIDEKI;KIM YOUNG-KUK;PARK MI-LIM |
分类号 |
G01R31/02;G01R13/34;G01R31/00 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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