ARRAY SUBSTRATE, PROCESS FOR PRODUCTION THEREOF, AND DISPLAY DEVICE

摘要

Disclosed are: an array substrate which ensures the reflow of a resist film onto a channel region to prevent the occurrence of defects in the channel region and enables the prevention of the spreading of a resist mask to a region outside of the channel region; a process for producing the array substrate; and a display device. A TFT (15) can be formed in the following manner: a flow-promoting layer (51) is formed on the entire surface of a substrate, a region of the flow-promoting layer (51) outside of a region corresponding to a channel region (Q) of a semiconductor film (20) is decomposed and removed by the irradiation with ultraviolet ray to form the flow-promoting layer (51) only on the channel region (Q), a resist film (28) is reflowed onto the channel region (Q) to form a reflow resist film (42), and the resulting product is etched to form the semiconductor film (20) in an island-like shape.