发明名称 COMPOSITION FOR SEALING SEMICONDUCTOR, SEMICONDUCTOR DEVICE, AND PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a composition for sealing a semiconductor, which enables the formation of a thin resin layer, can prevent the diffusion of a metallic component into a porous interlayer insulating layer, and has excellent adhesion to wiring materials. <P>SOLUTION: A resin having two or more cationic functional groups and having a weight average molecular weight of 2,000 to 100,000 is added to the semiconductor-sealing composition having both a sodium content and a potassium content of 10 ppb by weight or less in terms of the element contents. The composition has a volume average particle size of 10 nm or less as measured by a dynamic light scattering method. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011103490(A) 申请公布日期 2011.05.26
申请号 JP20110018670 申请日期 2011.01.31
申请人 MITSUI CHEMICALS INC 发明人 ONO SHOKO;TAKAMURA KAZUO
分类号 H01L21/312;H01L21/3205;H01L21/768;H01L23/52;H01L23/522 主分类号 H01L21/312
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