| 摘要 |
This variable-response magnetic radiofrequency device integrated into a substrate comprises: a beam that is mobile relative to the substrate having, at each end, a transversal part mechanically anchored to the substrate and at least one central arm connecting the transversal parts to each other, at least one of the transversal parts being made out of a piezoelectric material, actuating electrodes associated with the piezoelectric material to apply a stress on the central arm, a magnetic element directly deposited on the central arm whose permeability varies as a function of the stress, and a conductive strip comprising a central part fixed to an upper face of the magnetic element opposite the lower face of this magnetic element pointed towards the central arm. |
